Can I import equipment for semiconductor into China?

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Can I Import Semiconductor Equipment Into China? | CG360 FAQ


Yes, semiconductor equipment can be imported into China, but the process is governed by a complex interplay of China’s customs tariff schedule, import licensing requirements, and — critically — export control regulations from the equipment’s country of origin. In 2025, China imported approximately USD 40 billion worth of semiconductor manufacturing equipment, making it the world’s single largest market for wafer fabrication tools. However, not all equipment enters freely: advanced lithography systems (EUV, high-NA), certain etch and deposition tools designed for sub-7nm process nodes, and equipment destined for entities on the U.S. BIS Entity List face significant or insurmountable barriers. This FAQ walks through the regulatory landscape, classification and duty structure, exemption programs, export control risks, and step-by-step customs clearance procedures you need to know before shipping semiconductor equipment into China.

What Is the Regulatory Framework Governing Semiconductor Equipment Imports Into China?

Importing semiconductor equipment into China is not a single-country compliance exercise. It sits at the intersection of at least three distinct regulatory domains, each of which must be satisfied before equipment can lawfully enter Chinese territory.

China Domestic Law. The primary domestic statute is the Customs Law of the People’s Republic of China (海关法) together with implementing regulations issued by the General Administration of Customs of China (GACC), particularly Decrees 248 and 249 governing registration, inspection, and clearance. Under this framework, all imported goods must be declared using correct Harmonized System (HS) codes, valued according to WTO customs valuation methods, and cleared against applicable duties. Semiconductor manufacturing equipment falls under HS Chapter 84 (machinery) or Chapter 90 (optical, measuring, and testing equipment), with specific headings discussed below.

The Encouraged Industry Catalog. The Catalog of Encouraged Technologies and Products for Import (鼓励进口技术和产品目录) is jointly administered by the National Development and Reform Commission (NDRC) and the Ministry of Industry and Information Technology (MIIT). The 2025 revision of this catalog continues to list a wide range of semiconductor fabrication, assembly, and testing equipment as “encouraged” imports. Equipment that qualifies under this catalog can apply for import duty exemptions and VAT exemptions or refunds — a significant financial incentive that reduces the effective landed cost by 13% or more.

Export Controls of the Country of Origin. This is the factor that most often blocks a shipment. The U.S. Bureau of Industry and Security (BIS) maintains the Entity List, which as of mid-2026 includes over 70 Chinese semiconductor companies and research institutes, including Semiconductor Manufacturing International Corporation (SMIC), Yangtze Memory Technologies Corporation (YMTC), and most of the country’s advanced memory and logic fabs. Any equipment subject to U.S. jurisdiction (even if manufactured in a third country using U.S.-origin technology) that is destined for an Entity List party requires a BIS license, and such licenses are presumptively denied for advanced-node tools. Separately, the Dutch government, acting under the Wassenaar Arrangement and its own national export controls, requires an export license for ASML’s TWINSCAN NXT:2000i immersion lithography systems and above. Japan’s Ministry of Economy, Trade and Industry (METI) followed in May 2023 with restrictions on 23 types of semiconductor manufacturing equipment, including epitaxial growth, lithography, etching, and cleaning tools. A foreign-invested enterprise (WFOE) importing equipment into China must verify not only Chinese customs requirements but also whether the equipment is subject to re-export controls that may prohibit the transaction entirely.

How Are Semiconductor Equipment Imports Classified, and What Duties Apply?

Correct HS classification is the foundation of the import process. The wrong code can lead to overpayment of duties, delays, or penalties for misdeclaration. The table below lists the main HS headings applicable to semiconductor manufacturing equipment together with their Most-Favored-Nation (MFN) duty rates and VAT treatment as of 2026.

Equipment Type HS Code (6-digit) MFN Duty Rate VAT Rate Encouraged Catalog?
Lithography / projection equipment 8486.20 0% 13% Yes (for ≤28nm)
Etching / stripping equipment 8486.30 0–5% 13% Yes
Deposition equipment (CVD, PVD, ALD) 8486.40 0–5% 13% Yes
Ion implanters 8486.20 0% 13% Yes
Assembly / packaging equipment 8486.90 3–8% 13% Partial
Testing / inspection equipment 9030.82 0–4% 13% Yes
Chemical mechanical polishing (CMP) 8486.40 0% 13% Yes
Diffusion / oxidation / annealing furnaces 8486.10 0% 13% Yes

MFN duty rates for semiconductor equipment are generally low (0–8%), reflecting China’s WTO tariff commitments and its policy of encouraging high-tech manufacturing. The 13% VAT applies to virtually all equipment imports and is calculated on the CIF (cost, insurance, freight) value plus duty. However, equipment qualifying under the Encouraged Industry Catalog can obtain an exemption from both customs duty and VAT — effectively reducing the total tax burden from approximately 13–16% of CIF value to zero. This is the single most important financial lever available to importers and is discussed in detail in the next section.

It is critical to note that HS classification at the 6-digit level is harmonized globally, but China applies additional 8-digit and 10-digit subheadings. The correct 10-digit code determines not only the duty rate but also whether a specific import license (进口许可证, jìnkǒu xǔkězhèng) or commodity inspection (商品检验, shāngpǐn jiǎnyàn) is required. Importers should engage a licensed customs broker in China to confirm the correct classification before the shipment departs.

How Do the Import Duty Exemption and VAT Refund Programs Work?

China operates a generous incentive program for semiconductor equipment imports under the Encouraged Industry Catalog. The policy is designed to accelerate domestic fab construction by reducing the up-front tax burden on imported capital equipment.

Eligibility criteria. To qualify, the imported equipment must:

  1. Be listed in the current version of the Encouraged Industry Catalog (2025 revision);
  2. Be imported for use in a qualifying project — typically an integrated circuit (IC) manufacturing, packaging, or testing project that has been confirmed by NDRC or MIIT;
  3. Not have a domestically manufactured equivalent that meets the project’s technical requirements (the “domestic substitution” test);
  4. Be new equipment (second-hand equipment is generally not eligible for the full exemption).

The project confirmation letter. The key document is the Project Confirmation Letter (项目确认书, xiàngmù quèrèn shū) issued by the local office of MIIT (or in some cases by the provincial NDRC). This letter certifies that the project has been granted encouraged status and specifies the scope of equipment eligible for tax benefits. The application process requires submission of the project feasibility study, environmental impact assessment, and a detailed equipment list. Processing times vary by province but typically range from 30 to 60 working days.

Scope of benefits. Equipment imported under a valid Project Confirmation Letter is exempt from customs duty (0% payable) and exempt from VAT (0% payable at customs, with the importer retaining the right to claim input VAT credit for onward domestic VAT purposes). For a piece of equipment with a CIF value of USD 5 million, the total tax saving is approximately USD 650,000 to USD 800,000, depending on the applicable duty rate. This is a substantial benefit that can meaningfully improve the internal rate of return of a fab project.

Post-import supervision period. Equipment imported under the encouraged catalog regime is subject to a customs supervision period of five years from the date of import. During this period, the equipment may not be sold, leased, or otherwise transferred without GACC approval. If the equipment is disposed of during the supervision period without authorization, the importer must repay the exempted duties and VAT plus late-payment interest. Importers should maintain a fixed-asset register and annual inspection records to demonstrate compliance.

What Are the Key Export Control Challenges for Importers?

Export controls from the United States, the Netherlands, and Japan pose the most significant practical barrier to importing advanced semiconductor equipment into China. Even if Chinese customs clearance is straightforward, the equipment may never leave the port of origin if an export license is denied.

U.S. BIS Entity List. The U.S. Bureau of Industry and Security maintains the Entity List, which currently names more than 70 Chinese semiconductor entities. The list includes leading foundries (SMIC), memory manufacturers (YMTC, CXMT), advanced packaging houses, and key research institutes. Any item subject to the Export Administration Regulations (EAR) that is destined for an Entity List party requires a BIS license. For semiconductor manufacturing equipment capable of producing sub-14nm logic, 128-layer or higher NAND, or 18nm or smaller DRAM, the BIS licensing policy is presumptively deny. This means that even if the importer in China has a valid import license and is ready to clear customs, the U.S. exporter cannot lawfully ship the equipment. The restrictions extend to so-called “FDPR” (Foreign Direct Product Rule) items — equipment manufactured entirely outside the United States but incorporating U.S.-origin technology or software. As a result, European and Japanese equipment makers must also check whether their products fall under the scope of U.S. extraterritorial controls.

Dutch controls on ASML equipment. The Netherlands, as the home jurisdiction of ASML, the world’s dominant lithography supplier, has imposed national export license requirements on TWINSCAN NXT:2000i immersion systems and all higher-tier platforms (NXT:2050i, NXE EUV systems, and EXE high-NA EUV systems). Licenses are assessed on a case-by-case basis, and since 2023, the Dutch government has denied the vast majority of license applications for shipment to Chinese customers. Even service and spare parts for existing installed tools now require a license in many cases. This has effectively halted the sale of any advanced lithography tool to Chinese fabs.

Japanese METI restrictions. In May 2023, Japan’s Ministry of Economy, Trade and Industry expanded its export control list to cover 23 categories of semiconductor manufacturing equipment, including epitaxial growth equipment, lithography (including electron-beam and nanoimprint), dry etching, wet etching, cleaning, annealing, inspection, and deposition tools. While the Japanese regime does not impose a blanket prohibition, each export requires a METI license. The approval rate for licenses covering advanced-node equipment destined for China has dropped sharply since the restrictions took effect.

Practical recommendations for WFOEs. Foreign-invested enterprises importing semiconductor equipment into China should:

  • Conduct a dual-jurisdiction compliance review before placing any purchase order — verify whether the equipment is subject to U.S. (EAR), Dutch, or Japanese export controls in addition to Chinese import controls.
  • Screen the end user against the BIS Entity List, the Unverified List, and the Military End-User (MEU) List. Do not rely solely on the Chinese importer’s name — check beneficial ownership and parent company relationships.
  • Obtain a written export-control classification from the equipment manufacturer specifying the ECCN (Export Control Classification Number) and any license exception eligibility.
  • Include contractual provisions that make payment contingent on the seller obtaining all necessary export licenses. The buyer should not bear the risk of a denied license.
  • For lower-risk equipment (mature-node tools, 8-inch fab equipment, testers, and packaging tools that are not subject to advanced-node restrictions), ensure that the HS code and technical specifications are clearly documented to support a license exception or general authorization.

What Is the Step-by-Step Customs Clearance Process for Semiconductor Equipment?

Assuming export controls are satisfied, the Chinese customs clearance process for semiconductor equipment generally follows a well-established pathway. The timeline from port arrival to release is typically 3 to 10 working days for non-restricted equipment, though controlled items subject to import licensing can take significantly longer.

Step 1: Importer registration with GACC. Before any customs declaration can be filed, the importer must be registered with GACC and obtain a Customs Registration Code (海关编码). This is a one-time process requiring submission of the business license, Articles of Association, and a completed registration form. For WFOEs operating in China, this registration is typically already in place as part of the company’s incorporation process.

Step 2: Commodity inspection (商检, shāngpǐn jiǎnyàn). Certain semiconductor equipment, particularly items involving pressure vessels, high-voltage components, or hazardous process chemicals, is subject to compulsory inspection by CIQ (China Inspection and Quarantine). The inspection verifies that the equipment meets Chinese safety, environmental, and technical standards. Inspection applications must be filed before the goods arrive at the port, and the inspection itself may be conducted at the port or at the importer’s facility. Equipment classified as “special equipment” (特种设备) — such as gas cabinets, chemical delivery systems, or high-pressure reactors integrated into the tool — may require additional pre-import registration with the local Administration of Market Regulation.

Step 3: Customs declaration (报关, bàoguān). The customs declaration is submitted electronically through the China International Trade Single Window (单一窗口). The declaration must include:

  • The commercial invoice, packing list, and bill of lading or airway bill;
  • The correct 10-digit HS code and CIF value;
  • The import license (if applicable — e.g., for controlled two-use items subject to the Import License for Dual-Use Items and Technologies);
  • The Project Confirmation Letter (if claiming duty exemption);
  • The certificate of origin (if claiming preferential duty under a free trade agreement).

GACC will assign a risk rating to the consignment. Low-risk declarations (green channel) may be cleared without physical inspection. Medium-risk consignments are subject to document review. High-risk consignments — typically those involving restricted items or valuation concerns — require a physical examination (查验, cháyàn) at the port.

Step 4: Duty payment and release. Once the declaration is accepted and any physical inspection is completed, GACC issues a duty memo. The importer pays the assessed customs duty and VAT (unless exempted) via the Single Window portal. After payment confirmation, GACC releases the goods. The release notification (放行通知, fàngxíng tōngzhī) is transmitted electronically to the port terminal, authorizing the importer to arrange pickup and inland transportation.

Step 5: Post-clearance audit. GACC retains the right to conduct a post-clearance audit (后续稽查, hòuxù jīchá) for up to three years after import. For equipment imported under duty exemption, the audit risk is higher because GACC will verify that the equipment is still in the importer’s possession, remains at the declared location, and continues to be used for the approved project. Maintaining organized records — including the Project Confirmation Letter, customs declarations, inspection reports, fixed-asset registration, and annual usage reports — is essential.

What About Customs Bonds, Deposits, and Temporary Imports?

Several common scenarios — particularly involving demo equipment, loaner tools, or trial installations — require customs bonds or deposits rather than a full importation.

Temporary import of demo and loaner equipment. Semiconductor equipment manufacturers frequently need to bring demonstration units, evaluation tools, or loaner machines into China for customer evaluation, process qualification, or temporary capacity bridging. Under Chinese customs law, such equipment can be imported temporarily under a Temporary Importation Bond (暂时进出口, zànshí jìnchūkǒu). The key conditions are:

  • The equipment must be re-exported within six months (extendable to 12 months with GACC approval);
  • A customs deposit or bank guarantee must be posted in the amount of the duties and VAT that would be payable if the equipment were formally imported;
  • The equipment must not be sold, leased, or consumed in China during the temporary import period;
  • Monthly usage reports may be required.

When the equipment is re-exported, the deposit is refunded. This mechanism allows equipment vendors to support customer evaluations without triggering the full import duty and VAT liability. However, the deposit requirement can be substantial — for a USD 2 million lithography tool, the deposit would be approximately USD 260,000 (13% VAT equivalent). Many customs brokers can arrange a bank guarantee facility to avoid tying up cash.

Customs supervision period and deposit for encouraged-equipment imports. As noted earlier, equipment imported under the Encouraged Industry Catalog is subject to a five-year customs supervision period. During this period, the equipment is effectively under customs bond. If the importer wishes to sell or transfer the equipment before the supervision period expires, it must first obtain GACC approval and repay the exempted duties and VAT. Some importers choose to post a voluntary customs deposit as an alternative to maintaining the supervision record — though this practice is less common for large capital equipment.

Are There Special Rules for Importing Second-Hand Semiconductor Equipment?

Used semiconductor equipment attracts additional scrutiny from Chinese customs and inspection authorities. While imports of second-hand equipment are permitted in principle, the regulatory requirements are more stringent than for new equipment.

Age limits. GACC and the Ministry of Commerce require that used mechanical and electrical equipment imported into China generally be no more than 10 years old at the time of import. Some local customs districts apply stricter age limits — for example, Shanghai Customs has been known to require that semiconductor equipment be no more than eight years old. Importers should verify the applicable age limit with the local customs district before committing to a purchase.

Pre-shipment inspection. Used equipment classified as “old mechanical and electrical products” (旧机电产品) typically requires a pre-shipment inspection (装运前检验, zhuāngyùn qián jiǎnyàn) conducted by a GACC-authorized inspection body in the country of origin. The inspection verifies the equipment’s age, functionality, safety compliance, and the absence of prohibited materials (e.g., asbestos-containing components, ozone-depleting substances). The inspection report is submitted with the customs declaration.

Valuation challenges. Chinese customs apply a “transaction value” method for used equipment, but the declared value is subject to close scrutiny. If customs believes the declared value is understated — a common risk because used equipment prices are negotiated and may deviate from published market data — they will apply a reference valuation based on depreciation schedules, manufacturer list prices, or comparables. Importers should be prepared to provide supporting documentation, including the original purchase invoice, maintenance records, an independent appraisal report, and evidence of the arms-length nature of the transaction.

Warranty and spare parts. Customs may request evidence that the importer has arranged for spare parts availability and technical support for the used equipment. This requirement reflects a policy concern that aged equipment might be dumped in the Chinese market without adequate after-sales support. Importers can satisfy this requirement by providing a service agreement with the equipment supplier or an independent service provider.

Duty exemption not available. Used equipment generally does not qualify for the Encouraged Industry Catalog duty exemption program. The intent of the exemption is to encourage deployment of the most advanced manufacturing technology, not to subsidize the import of older-generation tools. Importers of second-hand equipment should budget for the full duty and VAT liability.

What Risks and Penalties Apply for Non-Compliance?

China’s customs enforcement has become increasingly sophisticated, and penalties for non-compliance in the semiconductor equipment space can be severe. The key risks include:

  • Misclassification (HS code error): Penalties range from 10% to 100% of the duty evaded, plus seizure of the goods in cases of intentional misdeclaration. For high-value equipment, this can easily run into millions of dollars.
  • Undervaluation: Customs will re-assess the value and impose a penalty of 10% to 50% of the additional duty payable. Repeat offenders may be placed on a higher-risk channel, resulting in physical inspection for every subsequent shipment.
  • Unauthorized transfer of exempted equipment: Transferring equipment subject to the five-year supervision period without GACC approval triggers repayment of all exempted duties and VAT, plus a late-payment surcharge (currently 0.05% per day).
  • Export control violations: While the primary enforcement risk falls on the exporter, Chinese importers can also face penalties if they knowingly import equipment in circumvention of foreign export controls. Under Chinese law, violating import restrictions on controlled items can result in confiscation of the goods, fines of up to five times the value of the goods, and potential criminal liability for responsible officers.

Engaging a licensed customs broker and a law firm with semiconductor-specific trade experience is strongly recommended for any significant equipment import. The cost of professional advice is negligible compared with the potential exposure.

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